Hopefully this will send a clear message that terrorism is not a profitable business to be involved in.
The families are seeking more than £10 million in compensation from the Real IRA suspects.
Mr Michael Gallagher, whose 21-year-old son Aidan died in the explosion, said the High Court action was not about money.
But he added: "Hopefully this will send a clear message that terrorism is not a profitable business to be involved in."
"We have cleared another hurdle and are now in the final stages now before we get to court."
A high-powered legal team has been employed by the families to sue Michael McKevitt, 51, Liam Campbell, 38, Colm Murphy, 51, Seamus McKenna, 49, and 33-year-old Seamus Daly.
The civil action is expected to be heard in Belfast later this year.
Murphy has been jailed for 14 years for conspiracy to commit explosions in connection with the Omagh attack.
Campbell is serving a five year sentence for membership of an illegal organisation, while McKevitt is due to go on trial charged with directing terrorism early next month.
Campbell and McKevitt have already announced they plan to contest the civil case against them.PA
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